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of Contents](#Toc)\n\n​\n\n​\n\n​\n\n**UNITED STATES**\n\n**SECURITIES AND EXCHANGE COMMISSION**\n\n**Washington, D.C. 20549**\n\n​\n\n**FORM ****10-Q**\n\n​\n\n**(Mark One)**\n\n​\n\n**☒**\n\n**QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934**\n\n​\n\n**For the quarterly period ended****March 31, 2026**\n\n​\n\n**or**\n\n​\n\n**☐**\n\n**TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934**\n\n​\n\n**For the transition period from               to               **\n\n​\n\n**Commission file number****000-30941**\n\n​\n\n**AXCELIS TECHNOLOGIES, INC.**\n\n(Exact name of registrant as specified in its charter)\n\n​\n\n​\n\n**Delaware**\n\n​\n\n**34-1818596**\n\n(State or other jurisdiction of\nincorporation or organization)\n\n​\n\n(IRS Employer\nIdentification No.)\n\n​\n\n**108 Cherry Hill Drive**\n\n**Beverly****,****Massachusetts********01915**\n\n(Address of principal executive offices, including zip code)\n\n​\n\n**(****978****) ****787-4000**\n\n(Registrant’s telephone number, including area code)\n\n​\n\nSecurities registered pursuant to Section 12(b) of the Act:\n\n​\n\n​\n\n​\n\n​\n\nTitle of each class\n\nTrading symbol\n\nName of each exchange on which registered\n\nCommon Stock, $0.001 par value\n\nACLS\n\nNasdaq Global Select Market\n\n​\n\nIndicate by check mark whether the registrant (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject to such filing requirements for the past 90 days.  Yes ☒  No ☐.\n\n​\n\nIndicate by check mark whether the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files). Yes ☒ No ☐.\n\n​\n\nIndicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, a smaller reporting company, or an emerging growth company. See the definitions of “large accelerated filer,” “accelerated filer,” “smaller reporting company,” and “emerging growth company” in Rule 12b-2 of the Exchange Act.\n\n​\n\n​\n\n​\n\nLarge accelerated filer ☒\n\n​\n\nAccelerated filer ☐\n\nNon-accelerated filer ☐\n\n​\n\nSmaller reporting company  ☐\n\n​\n\n​\n\nEmerging growth company ☐\n\n​\n\nIf an emerging growth company, indicate by check mark if registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. ☐\n\n​\n\nIndicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Exchange Act) Yes ☐ No  ☒\n\n​\n\nAs of May 5, 2026, there were 30,733,897 shares of the registrant’s common stock outstanding.\n\n​\n\n​\n\n[Table of Contents](#Toc)\n\n**Table of Contents**\n\n​\n\n​\n\n[**PART I - FINANCIAL INFORMATION**](#PART1FINANCIALINFORMATION_304973)\n\n​\n\n[**Item 1.**](#Item1FinancialStatements_869987)\n\n[**Financial Statements (Unaudited)**](#Item1FinancialStatements_869987)\n\n​\n\n​\n\n[Consolidated Statements of Operations for the three months ended March 31, 2026 and 2025](#ConsolidatedStatementsofOperations_8900)\n\n3\n\n​\n\n[Consolidated Statements of Comprehensive Income for the three months ended March 31, 2026 and 2025](#ConsolidatedStatementsofComprehensiveInc)\n\n4\n\n​\n\n[Consolidated Balance Sheets as of March 31, 2026 and December 31, 2025](#ConsolidatedBalanceSheets_859153)\n\n5\n\n​\n\n[Consolidated Statements of Stockholders’ Equity for the three months ended March 31, 2026 and 2025](#ConsolidatedStatementEquity)\n\n6\n\n​\n\n[Consolidated Statements of Cash Flows for the three months ended March 31, 2026 and 2025](#ConsolidatedStatementsofCashFlows_699712)\n\n7\n\n​\n\n[Notes to Consolidated Financial Statements (Unaudited)](#NotestoConsolidatedFinancialStatementsUn)\n\n8\n\n[**Item 2.**](#Item2ManagementsDiscussionandAnalysisofF)\n\n[**Management’s Discussion and Analysis of Financial Condition and Results of Operations**](#Item2ManagementsDiscussionandAnalysisofF)\n\n21\n\n​\n\n[Overview](#Overview_288809)\n\n21\n\n​\n\n[Critical Accounting Estimates](#CriticalAccountingEstimates_482826)\n\n21\n\n​\n\n[Results of Operations](#ResultsofOperations_659595)\n\n22\n\n​\n\n[Liquidity and Capital Resources](#LiquidityandCapitalResources_541794)\n\n26\n\n[**Item 3.**](#Item3QuantitativeandQualitativeDisclosur)\n\n[**Quantitative and Qualitative Disclosures About Market Risk**](#Item3QuantitativeandQualitativeDisclosur)\n\n27\n\n[**Item 4.**](#Item4ControlsandProcedures_773908)\n\n[**Controls and Procedures**](#Item4ControlsandProcedures_773908)\n\n27\n\n[**PART II - OTHER INFORMATION**](#PARTIIOTHERINFORMATION_940705)\n\n28\n\n[**Item 1.**](#Item1LegalProceedings_163018)\n\n[**Legal Proceedings**](#Item1LegalProceedings_163018)\n\n28\n\n[**Item 1A.**](#Item1ARiskFactors_163682)\n\n[**Risk Factors**](#Item1ARiskFactors_163682)\n\n28\n\n[**Item 2.**](#Item2UnregisteredSalesofEquitySecurities)\n\n[**Unregistered Sales of Equity Securities, Use of Proceeds, and Issuer Purchases of Equity Securities**](#Item2UnregisteredSalesofEquitySecurities)\n\n29\n\n[**Item 3.**](#Item3DefaultsUponSeniorSecurities_689958)\n\n[**Defaults Upon Senior Securities**](#Item3DefaultsUponSeniorSecurities_689958)\n\n29\n\n[**Item 4.**](#Item4MineSafetyDisclosures_365895)\n\n[**Mine Safety Disclosures**](#Item4MineSafetyDisclosures_365895)\n\n29\n\n[**Item 5.**](#Item5OtherInformation_535580)\n\n[**Other Information**](#Item5OtherInformation_535580)\n\n29\n\n[**Item 6.**](#Item6Exhibits_453635)\n\n[**Exhibits**](#Item6Exhibits_453635)\n\n30\n\n​\n\n​\n\n​\n\n2\n\n[Table of Contents](#Toc)\n\n​\n\n**PART 1—FINANCIAL INFORMATION**\n\n​"}