{"url_path":"/sec/acls/10-q/2026/item-6","section_key":"item-6","section_title":"Item 6 Exhibits.**","topic":"sec","document":{"doc_type":"10-Q","doc_date":"2026-05-08","source_url":"https://www.sec.gov/Archives/edgar/data/1113232/0001104659-26-057725-index.html","accession_number":"0001104659-26-057725","cik":"0001113232","ticker":"ACLS","issuer_name":"AXCELIS TECHNOLOGIES INC","edgar_url":"https://www.sec.gov/Archives/edgar/data/1113232/0001104659-26-057725-index.html","primary_entity_key":"0001113232","primary_entity_name":"AXCELIS TECHNOLOGIES INC"},"word_count":442,"has_tables":true,"body_markdown":"**Item 6.  Exhibits.**\n\n​\n\nThe following exhibits are filed herewith:\n\n​\n\n**Exhibit********No**\n\n**  ​ ​ ​**\n\n**Description**\n\n​\n\n​\n\n​\n\n3.1\n\n​\n\n[Restated Certificate of Incorporation of the Company filed November 2, 2017. Incorporated by reference to Exhibit 3.1 of the Company’s Form 10-Q filed with the Commission on November 3, 2017.](http://www.sec.gov/Archives/edgar/data/1113232/000155837017008078/acls-20170930ex31a83feb6.htm)\n\n​\n\n​\n\n​\n\n3.2\n\n​\n\n[Certificate of Amendment to the Restated Certificate of Incorporation of the Company filed May 9, 2024. Incorporated by reference to Exhibit 3.1 of the Company’s Form 8-K filed with the Commission on May 9, 2024](https://www.sec.gov/Archives/edgar/data/1113232/000110465924059307/tm2413500d1_ex3-1.htm).\n\n​\n\n​\n\n​\n\n3.3\n\n​\n\n[Bylaws of the Company, as amended as of May 11, 2022. Incorporated by reference to Exhibit 3.2 of the Company’s Form 8-K filed with the Commision on May 11, 2022.](https://www.sec.gov/Archives/edgar/data/1113232/000110465922058781/tm2213765d1_ex3-2.htm)\n\n​\n\n​\n\n​\n\n31.1*\n\n​\n\n[Certification of the Principal Executive Officer under Exchange Act Rule 13a-14(a)/15d-14(a) (Section 302 of the Sarbanes-Oxley Act), dated May 8, 2026.](acls-20260331xex31d1.htm)\n\n​\n\n​\n\n​\n\n31.2*\n\n​\n\n[Certification of the Principal Financial Officer under Exchange Act Rule 13a-14(a)/15d-14(a) (Section 302 of the Sarbanes-Oxley Act), dated May 8, 2026.](acls-20260331xex31d2.htm)\n\n​\n\n​\n\n​\n\n32.1**\n\n​\n\n[Certification of the Principal Executive Officer pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code (Section 906 of the Sarbanes-Oxley Act), dated May 8, 2026.](acls-20260331xex32d1.htm)\n\n​\n\n​\n\n​\n\n32.2**\n\n​\n\n[Certification of the Principal Financial Officer pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code (Section 906 of the Sarbanes-Oxley Act), dated May 8, 2026.](acls-20260331xex32d2.htm)\n\n​\n\n​\n\n​\n\n101*\n\n​\n\nThe following materials from the Company’s Form 10-Q for the quarter ended March 31, 2026, formatted in inline eXtensible Business Reporting Language (iXBRL): (i) Consolidated Statements of Operations, (ii) Consolidated Statements of Comprehensive Income, (iii) Consolidated Balance Sheets, (iv) Consolidated Statements of Cash Flows and (v) Notes to Consolidated Financial Statements (Unaudited). Filed herewith.\n\n​\n\n​\n\n​\n\n104*\n\n​\n\nCover Page Interactive Data File (formatted as iXBRL and contained in Exhibit 101).\n\n​\n\n​\n\n​\n\n* Filed herewith\n\n** This exhibit is being furnished rather than filed, and shall not be deemed incorporated by reference into any filing, in accordance with Item 601 of Regulation S-K.\n\n​\n\n​\n\n​\n\n30\n\n[Table of Contents](#Toc)\n\n​\n\n**SIGNATURES**\n\n​\n\nPursuant to the requirements of the Securities Exchange Act of 1934, the Registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto duly authorized.\n\n​\n\n​\n\nAXCELIS TECHNOLOGIES, INC.\n\nDATED: May 8, 2026\n\nBy:\n\n/s/ DAVID RYZHIK\n\n​\n\n​\n\n​\n\n​\n\n​\n\nDavid Ryzhik\n\n​\n\n​\n\n*Senior Vice President and Interim Chief Financial Officer*\n\n​\n\n​\n\n*Duly Authorized Officer and Principal Financial Officer*\n\n​\n\n​\n\n​\n\n31"}